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  Broadband optical end-point detection for linear chemical–mechanical planarization (CMP) processes using an image matching technique
 
 
Title: Broadband optical end-point detection for linear chemical–mechanical planarization (CMP) processes using an image matching technique
Author: Yi, Jingang
Xu, C. Shan
Appeared in: Mechatronics
Paging: Volume 15 (2005) nr. 3 pages 20 p.
Year: 2005
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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