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                                       Details for article 11 of 12 found articles
 
 
  Precision stage using a non-contact planar actuator based on magnetic suspension technology
 
 
Title: Precision stage using a non-contact planar actuator based on magnetic suspension technology
Author: Jung, Kwang Suk
Baek, Yoon Su
Appeared in: Mechatronics
Paging: Volume 13 (2003) nr. 8-9 pages 19 p.
Year: 2003
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 11 of 12 found articles
 
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