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                                       Details for article 13 of 17 found articles
 
 
  Precision positioning using MEMS based microactuator
 
 
Title: Precision positioning using MEMS based microactuator
Author: Afzulpurkar, Nitin
Weerakamhaeng, Yossawee
Appeared in: Mechatronics
Paging: Volume 12 (2002) nr. 9-10 pages 11 p.
Year: 2002
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 17 found articles
 
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