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Journal description
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Details for article 7 of 23 found articles
| Title: |
Characterization and modeling of the metal diffusion from deep ultraviolet photoresist and silicon-based substrate |
| Author: |
Wang, Tien-Ko Wang, Mei-Ya Ko, Fu-Hsiang Tseng, Chia-Lian |
| Appeared in: |
Applied radiation and isotopes |
| Paging: | Volume 54 (2001) nr. 5 pages 10 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 23 found articles
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