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Journal description
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Details for article 21 of 26 found articles
| Title: |
Remaining useful life prediction for ion etching machine cooling system using deep recurrent neural network-based approaches |
| Author: |
Wu, Shimeng Jiang, Yuchen Luo, Hao Yin, Shen |
| Appeared in: |
Control engineering practice |
| Paging: | Volume 109 () nr. C pages p. |
| Year: |
2021 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 26 found articles
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