Nanoimprint lithography: an alternative nanofabrication approach
Titel:
Nanoimprint lithography: an alternative nanofabrication approach
Auteur:
Sotomayor Torres, C.M. Zankovych, S. Seekamp, J. Kam, A.P. Clavijo CedeƱo, C. Hoffmann, T. Ahopelto, J. Reuther, F. Pfeiffer, K. Bleidiessel, G. Gruetzner, G. Maximov, M.V. Heidari, B.
Verschenen in:
Materials science and engineering. C, Biomimetic and supramolecular systems