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Journal description
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Details for article 20 of 75 found articles
| Title: |
Electron beam lithography and reactive ion etching of nanometer size features in niobium films |
| Author: |
Piotrowski, T.T. Piotrowska, A. Kamińska, E. Szopniewski, Z. Koleśnik, S. Wróbel, J. Gierłowski, P. Lewandowski, S. |
| Appeared in: |
Materials science and engineering. C, Biomimetic and supramolecular systems |
| Paging: | Volume 15 (2001) nr. 1-2 pages 3 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 75 found articles
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