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Journal description
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Details for article 17 of 37 found articles
| Title: |
DFT investigation of HfCl4 decomposition on hydroxylated SiO2: first stage of HfO2 atomic layer deposition |
| Author: |
Estève, A. Djafari Rouhani, M. Jeloaica, L. Estève, D. |
| Appeared in: |
Computational materials science |
| Paging: | Volume 27 (2003) nr. 1-2 pages 6 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 37 found articles
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