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Journal description
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Details for article 8 of 91 found articles
| Title: |
A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition |
| Author: |
Flicstein, J. Pata, S. Le Solliec, J.M. How Kee Chun, L.S. Palmier, J.F. Courant, J.L. |
| Appeared in: |
Computational materials science |
| Paging: | Volume 10 (1998) nr. 1-4 pages 11 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 91 found articles
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