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                                       Details for article 173 of 210 found articles
 
 
  RF plasma selective etching of boron nitride films
 
 
Title: RF plasma selective etching of boron nitride films
Author: Werbowy, A.
Szmidt, J.
SokoĊ‚owska, A.
Mitura, S.
Appeared in: Diamond and related materials
Paging: Volume 9 (2000) nr. 3-6 pages 5 p.
Year: 2000
Contents:
Publisher: Elsevier Science S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 173 of 210 found articles
 
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