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Characterization of magnetron sputtered carbon nitride films 1 Presented at the Diamond '98 Conference, Crete, Greece, 13–18 September, 1998. 1 |
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Title: |
Characterization of magnetron sputtered carbon nitride films 1 Presented at the Diamond '98 Conference, Crete, Greece, 13–18 September, 1998. 1 |
Author: |
Kulisch, W Delplancke-Ogletree, M.P Buliř, J Jelı́nek, M Jurek, K Zemek, J Klimovič, J |
Appeared in: |
Diamond and related materials |
Paging: |
Volume 8 (1999) nr. 6 pages 7 p. |
Year: |
1999 |
Contents: |
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Publisher: |
Elsevier Science S.A. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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