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Journal description
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Details for article 65 of 170 found articles
| Title: |
Etching process of hydrogenated amorphous carbon (a-C:H) thin films in a dual ECR–r.f. nitrogen plasma |
| Author: |
Hong, Junegie Turban, Guy |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 8 (1999) nr. 2-5 pages 5 p. |
| Year: |
1999 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 65 of 170 found articles
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