Fundamentals towards large area synthesis of multifunctional Ultrananocrystalline diamond films via large area hot filament chemical vapor deposition bias enhanced nucleation/bias enhanced growth for fabrication of broad range of multifunctional devices
Titel:
Fundamentals towards large area synthesis of multifunctional Ultrananocrystalline diamond films via large area hot filament chemical vapor deposition bias enhanced nucleation/bias enhanced growth for fabrication of broad range of multifunctional devices
Auteur:
Alcantar-Peña, Jesus J. de Obaldia, Elida Montes-Gutierrez, Jorge Kang, Karam Arellano-Jimenez, Maria J. Ortega Aguilar, Jose E. Suchy, Greta P. Berman-Mendoza, Dainet Garcia, Rafael Yacaman, Miguel J. Auciello, Orlando