Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition
Titel:
Structural, optical and mechanical properties of thin diamond and silicon carbide layers grown by low pressure microwave linear antenna plasma enhanced chemical vapour deposition
Auteur:
Taylor, Andrew Drahokoupil, Jan Fekete, Ladislav Klimša, Ladislav Kopeček, Jaromír Purkrt, Adam Remeš, Zdeněk Čtvrtlík, Radim Tomáštík, Jan Frank, Otakar Janíček, Petr Mistrík, Jan Mortet, Vincent