|
PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition |
|
|
|
Title: |
PECVD of carbon by inverted fireballs: From sputtering, bias enhanced nucleation to deposition |
Author: |
Knoll, P. Reynvaan, J. Mayer, M. Surnev, S. Geistlinger, P. Krenn, K. Ettinger, K. Prietl, C. Hohenau, A. Gruenwald, J. Kunert, B. Resel, R. |
Appeared in: |
Diamond and related materials |
Paging: |
Volume 65 (2016) nr. C pages 9 p. |
Year: |
2016 |
Contents: |
|
Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|