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Details for article 1 of 29 found articles
| Title: |
A comparative study of direct current magnetron sputtering and high power impulse magnetron sputtering processes for CNx thin film growth with different inert gases |
| Author: |
Schmidt, Susann Czigány, Zsolt Wissting, Jonas Greczynski, Grzegorz Janzén, Erik Jensen, Jens Ivanov, Ivan Gueorguiev Hultman, Lars |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 64 (2016) nr. C pages 14 p. |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 29 found articles
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