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Journal description
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Details for article 19 of 28 found articles
| Title: |
Microwave power effects on the properties of phosphorus-doped SiC:H films prepared using ECR-CVD |
| Author: |
Yoon, S.F. Ji, R. Ahn, J. Milne, W.I. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 6 (1997) nr. 1 pages 7 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 28 found articles
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