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                                       Details for article 3 of 11 found articles
 
 
  In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry
 
 
Title: In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry
Author: Shammas, Joseph
Sun, Tianyin
Koeck, Franz A.M.
Rezikyan, Aram
Nemanich, Robert J.
Appeared in: Diamond and related materials
Paging: Volume 56 (2015) nr. C pages 10 p.
Year: 2015
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 3 of 11 found articles
 
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