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Journal description
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Details for article 10 of 11 found articles
| Title: |
Plasma-activated direct bonding of patterned silicon-on-insulator wafers to diamond-coated wafers under vacuum |
| Author: |
Can, Uryan Isik Bayram, Baris |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 47 (2014) nr. C pages 5 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 11 found articles
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