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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 8 of 281 found articles
| Title: |
Amorphous carbon based materials as the interconnect dielectric in ULSI chips |
| Author: |
Grill, A. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 10 (2001) nr. 2 pages 6 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 281 found articles
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