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Journal description
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Details for article 6 of 16 found articles
| Title: |
Diamond membranes with controlled stress for submicron lithography |
| Author: |
Schäfer, L. Bluhm, A. Klages, C.-P. Löchel, B. Buchmann, L.-M. Huber, H.-L. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 2 (1993) nr. 8 pages 6 p. |
| Year: |
1993 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 16 found articles
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