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Design and optimization of a high-efficiency MPCVD reactor for 4-inch diamond film deposition based on steady-state Multiphysics modeling |
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Titel: |
Design and optimization of a high-efficiency MPCVD reactor for 4-inch diamond film deposition based on steady-state Multiphysics modeling |
Auteur: |
Zhang, Wencong Yang, Yong Zhu, Huacheng Peng, Xiaoshan Tian, Hongxing Han, Dongxue Peng, Renyu Wu, Li Tian, Wenyan Tao, Junwu |
Verschenen in: |
Diamond and related materials |
Paginering: |
Jaargang 157 () nr. C pagina's p. |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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