Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane
Titel:
Tuning the surface energy of fluorinated diamond-like carbon coatings via plasma immersion ion implantation plasma-enhanced chemical vapor deposition with 1,1,1,2-tetrafluoroethane
Auteur:
Tong, Yuhan Zahedian, Maryam Zeng, Aiping Vidrio, Ricardo Efremov, Mike Yin, Shenwei Mei, Hongyan Heaney, Patrick J. Choy, Jennifer T.