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Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition |
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Title: |
Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition |
Author: |
Wan, G.J. Yang, P. Fu, Ricky K.Y. Mei, Y.F. Qiu, T. Kwok, S.C.H. Ho, Joan P.Y. Huang, N. Wu, X.L. Chu, Paul K. |
Appeared in: |
Diamond and related materials |
Paging: |
Volume 15 (2006) nr. 9 pages 6 p. |
Year: |
2006 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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