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                                       Details for article 64 of 73 found articles
 
 
  The application of polycrystalline diamond in a thin film packaging process for MEMS resonators
 
 
Title: The application of polycrystalline diamond in a thin film packaging process for MEMS resonators
Author: Zhu, Xiangwei
Aslam, Dean M.
Sullivan, John P.
Appeared in: Diamond and related materials
Paging: Volume 15 (2006) nr. 11-12 pages 5 p.
Year: 2006
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 64 of 73 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands