Microwave hydrogen plasma etching on the laser-cut surface of single crystal diamond: Phases, etching morphology, stress evolution and the effect of etching on the subsequent homoepitaxial growth
Titel:
Microwave hydrogen plasma etching on the laser-cut surface of single crystal diamond: Phases, etching morphology, stress evolution and the effect of etching on the subsequent homoepitaxial growth
Auteur:
Wei, Yongning Gao, Jie Zheng, Ke Ma, Yong Zhi, Jiaqi Jia, Wenru Zheng, Xin Qu, Shuaiwu Zhou, Bing Yu, Shengwang