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Journal description
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Details for article 4 of 189 found articles
| Title: |
Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions |
| Author: |
Gottardi, G. Laidani, N. Bartali, R. Filippi, M. Calliari, L. Brusa, R.S. Mariazzi, S. Macchi, C. Anderle, M. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 14 (2005) nr. 3-7 pages 5 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 189 found articles
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