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                                       Details for article 21 of 84 found articles
 
 
  Effect of tail time of discharge current on film properties in diamond-like carbon deposition by high-frequency inclusion high-power impulse magnetron sputtering
 
 
Title: Effect of tail time of discharge current on film properties in diamond-like carbon deposition by high-frequency inclusion high-power impulse magnetron sputtering
Author: Fukue, Hiroyuki
Nakatani, Tatsuyuki
Okano, Tadayuki
Kuroiwa, Masahide
Kunitsugu, Shinsuke
Oota, Hiroki
Yonezawa, Ken
Appeared in: Diamond and related materials
Paging: Volume 135 () nr. C pages p.
Year: 2023
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 21 of 84 found articles
 
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