|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 6 of 32 found articles
| Title: |
Effect of sputtering target power density on topography and residual stress during growth of nanocomposite nc-TiN/a-SiN x thin films |
| Author: |
Zhang, Sam Sun, Deen Fu, Yongqing Du, Hejun Zhang, Qing |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 13 (2004) nr. 10 pages 8 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 32 found articles
| << previous | next >> |