Microstructure, mechanical, and wettability properties of Al-doped diamond-like films deposited using a hybrid deposition technique: Bias voltage effects
Titel:
Microstructure, mechanical, and wettability properties of Al-doped diamond-like films deposited using a hybrid deposition technique: Bias voltage effects
Auteur:
Ding, Ji Cheng Chen, Mohan Mei, Haijuan Jeong, Seonghee Zheng, Jun Yang, Yang Wang, Qimin Kim, Kwang Ho