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                                       Details for article 27 of 34 found articles
 
 
  Reactive magnetron sputtering of Si–C–N films with controlled mechanical and optical properties
 
 
Title: Reactive magnetron sputtering of Si–C–N films with controlled mechanical and optical properties
Author: Vlček, Jaroslav
Kormunda, Martin
Čı́žek, Jiřı́
Soukup, Zbyněk
Peřina, Vratislav
Zemek, Josef
Appeared in: Diamond and related materials
Paging: Volume 12 (2003) nr. 8 pages 8 p.
Year: 2003
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 27 of 34 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands