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Surface analysis and defect characterization of 4H–SiC wafers for power electronic device applications |
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Title: |
Surface analysis and defect characterization of 4H–SiC wafers for power electronic device applications |
Author: |
Scaltrito, L. Fanchini, G. Porro, S. Cocuzza, M. Giorgis, F. Pirri, C.F. Mandracci, P. Ricciardi, C. Ferrero, S. Sgorlon, C. Richieri, G. Merlin, L. |
Appeared in: |
Diamond and related materials |
Paging: |
Volume 12 (2003) nr. 3-7 pages 3 p. |
Year: |
2003 |
Contents: |
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Publisher: |
Elsevier Science B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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