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Journal description
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Details for article 21 of 26 found articles
| Title: |
Plasma chemistry during the deposition of a-C:H films and its influence on film properties |
| Author: |
Benedikt, J. Woen, R.V. van Mensfoort, S.L.M. Perina, V. Hong, J. van de Sanden, M.C.M. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 12 (2003) nr. 2 pages 8 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 26 found articles
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