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Journal description
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Details for article 1 of 26 found articles
| Title: |
Amorphous carbon nitride deposition by nitrogen radical sputtering C+N+O+H |
| Author: |
Nitta, Shoji Aono, Masami Katsuno, Takashi Naruse, Yohko |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 12 (2003) nr. 2 pages 8 p. |
| Year: |
2003 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 26 found articles
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