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                                       Details for article 27 of 92 found articles
 
 
  Effect of ion-bombardment on the deposition of a-CN x :H films in CH4/N2 r.f. plasma
 
 
Title: Effect of ion-bombardment on the deposition of a-CN x :H films in CH4/N2 r.f. plasma
Author: Mutsukura, Nobuki
Daigo, Yoshiaki
Appeared in: Diamond and related materials
Paging: Volume 12 (2003) nr. 10-11 pages 4 p.
Year: 2003
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 27 of 92 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands