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                                       Details for article 14 of 17 found articles
 
 
  Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD
 
 
Title: Stress and structural properties of diamond-like carbon films deposited by electron beam excited plasma CVD
Author: Ban, Masahito
Hasegawa, Takeshi
Fujii, Sadao
Fujioka, Junzo
Appeared in: Diamond and related materials
Paging: Volume 12 (2003) nr. 1 pages 10 p.
Year: 2003
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 14 of 17 found articles
 
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