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                                       Details for article 6 of 18 found articles
 
 
  Effects of substrate bias on nanotribologyof a-C:H films deposited by ECR-MPCVD
 
 
Title: Effects of substrate bias on nanotribologyof a-C:H films deposited by ECR-MPCVD
Author: Fang, Te-Hua
Weng, Cheng-I
Chiang, Ming-Jeng
Appeared in: Diamond and related materials
Paging: Volume 11 (2002) nr. 9 pages 7 p.
Year: 2002
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 18 found articles
 
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