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Journal description
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Details for article 36 of 208 found articles
| Title: |
Deposition of amorphous CN x by d.c. and rf plasma sputtering using a rf radical nitrogen beam source |
| Author: |
Hayashi, Y. Rahman, M.M. Kaneko, K. Soga, T. Umeno, M. Jimbo, T. |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 11 (2002) nr. 3-6 pages 1178-1182 |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 36 of 208 found articles
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