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                                       Details for article 46 of 63 found articles
 
 
  Preparation of silicon-doped diamond-like carbon films with electrical conductivity by reactive high-power impulse magnetron sputtering combined with a plasma-based ion implantation system
 
 
Title: Preparation of silicon-doped diamond-like carbon films with electrical conductivity by reactive high-power impulse magnetron sputtering combined with a plasma-based ion implantation system
Author: Shibata, Yuki
Kimura, Takashi
Nakao, Setsuo
Azuma, Kingo
Appeared in: Diamond and related materials
Paging: Volume 101 () nr. C pages p.
Year: 2020
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 46 of 63 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands