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                                       Details for article 202 of 221 found articles
 
 
  The effect of hydrogen- and oxygen-plasma treatments on dielectric properties of amorphous carbon nitride films
 
 
Title: The effect of hydrogen- and oxygen-plasma treatments on dielectric properties of amorphous carbon nitride films
Author: Aono, Masami
Naruse, Yohko
Nitta, Shoji
Katsuno, Takashi
Appeared in: Diamond and related materials
Paging: Volume 10 (2001) nr. 3-7 pages 5 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 202 of 221 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands