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Journal description
All volumes of the corresponding journal
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Details for article 197 of 221 found articles
| Title: |
Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors |
| Author: |
Sugino, Takashi Tai, Tomoyoshi Etou, Yoshihiro |
| Appeared in: |
Diamond and related materials |
| Paging: | Volume 10 (2001) nr. 3-7 pages 5 p. |
| Year: |
2001 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 197 of 221 found articles
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