Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Titel:
Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
Auteur:
Krauss, A.R. Auciello, O. Gruen, D.M. Jayatissa, A. Sumant, A. Tucek, J. Mancini, D.C. Moldovan, N. Erdemir, A. Ersoy, D. Gardos, M.N. Busmann, H.G. Meyer, E.M. Ding, M.Q.