Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery
Titel:
Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery
Auteur:
Chittinan, D. Buranasiri, P. Lertvanithphol, T. Eiamchai, P. Patthanasettakul, V. Chananonnawathorn, C. Limwichean, S. Nuntawong, N. Klamchuen, A. Muthitamongkol, P. Limsuwan, P. Chindaudom, P. Nukeaw, J. Nakajima, H. Horprathum, M.