|
Al2O3-Y2O3 ultrathin multilayer stacks grown by atomic layer deposition as perspective for optical waveguides applications |
|
|
|
Title: |
Al2O3-Y2O3 ultrathin multilayer stacks grown by atomic layer deposition as perspective for optical waveguides applications |
Author: |
López, J. Borbón-Nuñez, H.A. Lizarraga-Medina, E.G. Murillo, E. Machorro, R. Nedev, N. Marquez, H. Farías, M.H. Tiznado, H. Soto, G. |
Appeared in: |
Optical materials |
Paging: |
Volume 72 (2017) nr. C pages 788-794 |
Year: |
2017 |
Contents: |
|
Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|