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Journal description
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Details for article 9 of 18 found articles
| Title: |
Growth and characterization of SiON thin films by using thermal-CVD machine |
| Author: |
Pandey, R.K. Patil, L.S. Bange, J.P. Patil, D.R. Mahajan, A.M. Patil, D.S. Gautam, D.K. |
| Appeared in: |
Optical materials |
| Paging: | Volume 25 (2004) nr. 1 pages 7 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 18 found articles
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