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Oxidation of silicon on substrate induced bubble-like damage of Mo/Si mirror irradiated by femtosecond EUV pulses |
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Titel: |
Oxidation of silicon on substrate induced bubble-like damage of Mo/Si mirror irradiated by femtosecond EUV pulses |
Auteur: |
Li, Jiahao Peng, Yunqi Zhao, Yuanan Zhu, Xiangyu Ke, Ligong Zhao, Jiaoling Zhang, Ge Wang, Tao Xia, Zhilin Wei, Zhangfan Li, Xiaoran Shao, Jianda |
Verschenen in: |
Optical materials |
Paginering: |
Jaargang 162 () nr. C pagina's p. |
Jaar: |
2025 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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