Deposition of alternative plasmonic ZrHfN thin films via closed-field dual-cathode DC unbalanced magnetron sputtering for enhanced SEF substrate applications
Titel:
Deposition of alternative plasmonic ZrHfN thin films via closed-field dual-cathode DC unbalanced magnetron sputtering for enhanced SEF substrate applications
Auteur:
Chaikeeree, T. Kasayapanand, N. Mungkung, N. Phae-ngam, W. Lertvanithphol, T. Dhanasiwawong, K. Nakajima, H. Gitgeatpong, G. Prathumsit, J. Chittinan, D. Arunrungrusmi, S. Triamnak, N. Horprathum, M.