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                                       Details for article 130 of 169 found articles
 
 
  Silicon nitride thin-films deposited by radiofrequency reactive sputtering: Refractive index optimization with substrate cooling in a nitrogen-rich atmosphere
 
 
Title: Silicon nitride thin-films deposited by radiofrequency reactive sputtering: Refractive index optimization with substrate cooling in a nitrogen-rich atmosphere
Author: Freitas, João R.
Pimenta, Sara
Rodrigues, Vítor H.
Silva, Manuel F.
Correia, José H.
Appeared in: Optical materials
Paging: Volume 149 () nr. C pages p.
Year: 2024
Contents:
Publisher: The Authors
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 130 of 169 found articles
 
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