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Ecofriendly silicon dioxide chemical vapor deposition for semiconductor devices using nitrogen monoxide gas source |
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Title: |
Ecofriendly silicon dioxide chemical vapor deposition for semiconductor devices using nitrogen monoxide gas source |
Author: |
Jeong, Yeojin Nguyen, Minh Phuong Song, Jang-Kun Kim, Yong-Sang Chung, Yung-Bin Jeon, Woo-Seok Jo, Jungyun Kim, Youngkuk Pham, Duy Phong Yi, Junsin |
Appeared in: |
Optical materials |
Paging: |
Volume 148 () nr. C pages p. |
Year: |
2024 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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