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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 6 of 17 found articles
| Title: |
Electron cyclotron resonance etching of GaAs vias for monolithic microwave integrated circuits |
| Author: |
Chen, Y.W Ooi, B.S Ng, G.I |
| Appeared in: |
Optical materials |
| Paging: | Volume 14 (2000) nr. 3 pages 5 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 17 found articles
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